Tungsten Sputtering Target

Pure tungsten sputtering targets are metal targets with high melting point, high density and high purity, which are widely used in semiconductors, optical coatings, nuclear industry and wear-resistant films.

Our high-purity tungsten sputtering targets are made of high-purity (usually above 99.95%) tungsten and are specially used as discs or rectangular blocks as source materials in the sputtering coating process.

Its high purity ensures that the final film has an extremely low impurity content, which is especially important for applications that require high precision and high performance. In addition, high-purity tungsten also has an excellent melting point, good thermal stability and mechanical strength, which makes it an ideal choice for applications in high-temperature environments.

Pure tungsten targets: used for high melting point, high density films, such as semiconductor barrier layers and X-ray targets.
Alloy targets: such as W-Ti (diffusion barrier layers for integrated circuits) and W-Re (to improve high temperature strength).
Compound targets: such as tungsten carbide (WC, superhard coating) and tungsten oxide (WO₃, electrochromic film).

Powder metallurgy: High purity tungsten powder is formed by hot isostatic pressing (HIP) or hot pressing sintering to improve density.
Smelting method: Electron beam melting (EBM) is used for ultra-high purity tungsten targets, but the cost is relatively high.
Machining: Tungsten has high hardness and requires precision machining with diamond tools (common thickness 3-10mm, diameter 1-8 inches).
Binding: Usually combined with copper or molybdenum backplanes to improve heat dissipation (tungsten has good thermal conductivity but is brittle).

(1) Semiconductors and microelectronics
Diffusion barrier: W or W-Ti films are used in copper interconnect processes to prevent Cu from diffusing into the silicon substrate.
Gate material: Replaces polysilicon and reduces resistance (such as DRAM capacitors).

(2) Optical and display technology
X-ray target: Tungsten's high atomic number (Z=74) makes it an ideal material for X-ray tube anodes.
Electrochromic film: Tungsten oxide (WO₃) is used for smart windows and anti-glare rearview mirrors.

(3) Wear-resistant and protective coatings
Tungsten carbide (WC) coating: Surface hardening of tools and molds.
Nuclear fusion device: Tungsten is used as plasma facing material (PFM) to resist high-temperature plasma erosion.

(4) Scientific research field
Superconducting material: Tungsten film is used to study quantum phenomena under extreme conditions.
High-energy physics: Radiation shielding layer in particle detectors.

WTi sputtering target

WS2 sputtering target

WO3 sputtering target

WSi2 sputtering target

FAQ

Are you a factory or manufacturer?
A: Yes, we are a factory but we generally use our trading company to handle the business abroad. It will be more convenient to receive the remittance and arrange the shipment.

What is the delivery method?
A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to seaport or by air to the closest airport.

Why is your product so cost-effective?
A: We cut out the middlemen in the end-to-end manufacturing process. We obtain our raw material directly from its source.

Do you do spot quality inspection or full inspection?
A: 100% full inspection. Inspectors will check the finished product individually, to ensure they adhere to all parameters. All unqualified products are discarded.

How do you ensure your lead time?
A: From material preparation to machining, and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.

What is the MOQ of tungten target ?
A: Depends on quantity, generally, no MOQ limit.

How to pay for it?
A: A bank transfer (T/T) will be acceptable.

What is the delivery time?
A: around 7-20 days which depends on the quantity and production.

What is kind of the package?
A: Generally, we use a carton case or plywood case with protective material inside to ensure the save of cargo

What is the lead time?
A: from order placed to cargo receiving will take around 10-25 days.

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