Products Description
As an important transition metal, zirconium plays an irreplaceable role in the nuclear industry, medical devices and semiconductor fields due to its excellent neutron transparency, corrosion resistance and biocompatibility.
Pure zirconium sputtering target is a sputtering target made of high-purity zirconium material. The color of zirconium target is silver-white metallic color, the density is 6.49g/cm3, and the melting point is 1852°C.
Zirconium target has excellent physical and chemical properties. The application of zirconium target in magnetron sputtering can produce high-quality zirconium thin films and is widely used in microelectronics, optics, optoelectronics and other fields. Our high purity sputtering target can make the film possess an outstanding level of electrical conductivity and minimize the particle formation during the PVD process.
High-End Application of Pure Zirconium Sputtering Target
(1) Nuclear energy industry
Nuclear fuel cladding: Zr-4 alloy film (Sn 1.5%/Fe 0.2%/Cr 0.1%)
Heavy water reactor pressure tube: Zr-2.5Nb nano coating (hydrogen embrittlement resistance)
(2) Biomedicine
Dental implants: ZrO₂ ceramic film (bending strength>900MPa)
Degradable heart stent: Zr-Mo alloy film (degradation rate 0.05mm/year)
(3) Semiconductor manufacturing
High-k gate dielectric: ZrO₂ film (ε≈25, E_g≈5eV)
Copper interconnect barrier: ZrN (thickness <2nm, thermal stability 800℃)
(4) Special coatings
Spacecraft thermal protection: ZrB₂-SiC composite film (temperature resistance>2000℃)
Tool hard coating: Zr-Al-N (hardness>30GPa)
Zirconium (Zr) Specifications
|
Material Type |
Zirconium |
|
Symbol |
Zr |
|
Atomic Weight |
91.224 |
|
Atomic Number |
40 |
|
Color/Appearance |
Silvery White, Metallic |
|
Thermal Conductivity |
22.7 W/m.K |
|
Melting Point (°C) |
1,852 |
|
Coefficient of Thermal Expansion |
5.7 x 10-6/K |
Target Selection Suggestions
| Application | Preferred Target | Reference indicators |
| Nuclear Fuel Cladding | Zr-4 alloy rotary target | Sn/Fe/Cr content ±0.05% |
| Dental Implants | 3Y-ZrO₂ target (cubic phase >95%) | Fracture toughness >5MPa·m½ |
| Semiconductors | ZrN planar target | Resistivity <60μΩ·cm |
| Aerospace Thermal Protection | ZrB₂-SiC(20%) composite target | Oxidation rate <0.1mg/cm²@16 |
Related Sputtering Materials
ZrY Sputtering Target
TiZr Sputtering Target
ZrO2 Sputtering Target
ZrB2 Sputtering Target
HfZrO2 Sputtering Target
FAQ
Are you a factory or manufacturer?
A: Yes, we have a factory but we generally use our trading company to handle the business abroad. It will be convenient to receive the remittance and arrange the shipment.
What is the delivery method?
A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to seaport or by air to the closest airport.
Why is your product so cost-effective?
A:We cut out the middlemen in the end-to-end manufacturing process. We obtain our raw material directly from its source.
Do you do spot quality inspection or full inspection?
A: 100% full inspection. Inspectors will check the finished product individually, to ensure they adhere to all parameters. All unqualified products are discarded.
How do you ensure your lead time?
A: We have an efficient Order Management System, from material preparation to machining, and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.
What is the MOQ of Pure Zirconium Sputtering Target?
A: Depends on quantity, generally, no MOQ limit.
How to pay for it?
A: A bank transfer (T/T) will be acceptable.
What is the delivery time?
A: around 7-20 days which depends on the quantity and production.
What is kind of the package?
A: Generally, we use a carton case or plywood case with protective material inside to ensure the save of cargo
What is the lead time?
A: from order placed to cargo receiving will take around 10-25 days.
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