Copper Sputtering Target
Copper Sputtering Target

Copper Sputtering Target

Copper sputtering target has the same properties as metal copper(Cu).Copper is a chemical element with the symbol Cu (from Latin: cuprum) and atomic number 29. It is a soft, malleable, and ductile metal with very high thermal and electrical conductivity.
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Products Description

 

As the most important metal interconnect material, copper occupies a core position in semiconductors, display technology, new energy and other fields due to its excellent conductivity and economy.

 

We can produce copper sputtering target with purity of 99.9%~99.9999%, and the lowest oxygen content can be semiconductor wiring, etc. We not only produce planar copper sputtering targets (maximum G8.5 generation), but also copper rotary targets, which are mainly used for the touch screen industry. Since it is difficult to break the grain, we can only process with very large deformation and control the growth of twins to achieve a fine and uniform microstructure, which ensure a lower erosion rate and sensitivity of the formation of particles during sputtering.

 

Application 

 

1) Advanced semiconductor process

3nm node: Cu dual Damascus process (aspect ratio > 15:1)

Chip packaging: Cu micro-bumps (diameter < 5μm, eutectic temperature 250°C)

(2) Display technology

OLED anode: Cu/ITO composite film (square resistance < 5Ω/□)

Flexible display: ultra-thin Cu film (thickness < 100nm, bending resistance > 100,000 times)

(3) New energy devices

Lithium battery current collector: Cu nanoporous film (porosity > 70%)

Photovoltaic electrode: Cu(In,Ga)Se₂ (CIGS) prefabricated layer

(4) Quantum computing

Superconducting circuit: Cu/NbTiN composite film (surface resistance < 10nΩ)

 

Copper (Cu) Specifications

 

Material Type

Copper

Symbol

Cu

Atomic Weight

63.546

Atomic Number

29

Color/Appearance

Copper, Metallic

Thermal Conductivity

400 W/m.K

Melting Point (°C)

1,083

Coefficient of Thermal Expansion

16.5 x 10-6/K

 

Copper sputtering target and preparation method

 

The copper is purified from 99.95% to 99.99%, 99.999%, and 99.9999% through multiple electrolysis and regional smelting. The highest purity in China is about 99.9999% (6N). With high-purity copper ingots as raw materials, forging, rolling, and heat treatment of the raw materials can make the crystal grains in the copper ingots become smaller and increase the density to meet the requirements of copper targets for sputtering. The high-purity copper material after the deformation treatment is mechanically processed. The copper target processing requires high precision and high surface quality, and it can be processed into the target size required by the vacuum coating machine.

 

Related Sputtering Materials

 

CuNi sputtering target

AlCu sputtering target

Cu2ZnSnS4 sputtering target

CuNiTi sputtering target

CuS sputtering target

CuSn sputtering target

CuZn sputtering target

CoCu sputtering target

Cu2O sputtering target

CoCrZr sputtering target

CoNiMn sputtering target

CuO sputtering target

AlSiCu sputtering target

 

 

Are you a factory or manufacturer?
A: Yes, we are a factory but we generally use our trading company to handle the business abroad. It will be more convenient to receive the remittance and arrange the shipment.

What is the delivery method?
A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to seaport or by air to the closest airport.

Why is your product so cost-effective?
A: We cut out the middlemen in the end-to-end manufacturing process. We obtain our raw material directly from its source.

Do you do spot quality inspection or full inspection?
A: 100% full inspection. Inspectors will check the finished product individually, to ensure they adhere to all parameters. All unqualified products are discarded.

How do you ensure your lead time?
A: From material preparation to machining, and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.

What is the MOQ?
A: Depends on quantity, generally, no MOQ limit.

How to pay for it?
A: A bank transfer (T/T) will be acceptable.

What is the delivery time?
A: around 7-20 days which depends on the quantity and production.

What is kind of the package?
A: Generally, we use a carton case or plywood case with protective material inside to ensure the save of cargo

What is the lead time?
A: from order placed to cargo receiving will take around 10-25 days.

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