Description of Tantalum Sputtering Target Disc
The Tantalum Sputtering Target Disc is a key material used in Physical Vapor Deposition (PVD). It is mainly used to deposit tantalum films on substrates. Tantalum is a rare, hard, blue-gray, and shiny transition metal. It has a high melting point (3017°C) and excellent corrosion resistance.This target disc is usually made of high-purity tantalum, with purity reaching over 99.995%.
Tantalum sputtering target is mainly applied in the semiconductor industry and the optical coating industry. We manufacture various specifications of tantalum sputtering targets upon the request of customers from the semiconductor industry and optical industry through vacuum EB furnace smelting method. We produce different dimensions of the tantalum sputtering targets such as disc targets, rectangular targets and rotary targets.
Features of Tantalum Sputtering Target Disc
High Thermal Stability and Extreme Melting Point: Tantalum exhibits a remarkably high melting point, thus remaining stable during the high-temperature sputtering process. It maintains stability with respect to change.
Low Thermal Expansion: Tantalum possesses a very low expansion ratio (~6.3 µm/m · K). This provides good stability pertaining to dimensional accuracy concerning microgeometry during uniform heating and cooling.
Excellent Chemical Stability: Tantalum is also unresponsive to most acids and aggressive gases. It remains enduring even under harsh conditions.
Good Mechanical Properties: Tantalum exhibits great hardness as well as elevated temperatures, moderate temperatures, and toughness. This enables it to withstand the use and processing during and after.
Moderate Electrical Conductivity: The thermal conductivity of tantalum is intermediate between highly conductive metals and insulators. This enables the use of tantalum in DC and RF sputtering systems.
Non-Magnetic Property: Tantalum is paramagnetic, which means it does not form permanent magnetic fields. This property is very useful where there is a high sensitivity to magnetic disruptions.

Applications of Tantalum Sputtering Target Disc
Semiconductor Manufacturing: Tantalum sputtering targets are used to create diffusion barrier layers in semiconductor chips, protecting copper interconnects.
Electronics: They are used in high-performance capacitors, magnetic storage media, and inkjet printer heads.
Optical Coatings: Tantalum films provide specific optical properties for lenses, displays, and sensors.
Corrosion-Resistant Coatings: They protect chemical processing equipment and metal surfaces, extending their lifespan.
Medical Devices: Thanks to tantalum's biocompatibility, it is ideal for coatings on medical implants.

Specifications of Tantalum Sputtering Target Disc
Metallic impurities, ppm max by weight, Balance - Tantalum
|
Element |
Fe |
Mo |
Nb |
Ni |
Si |
Ti |
W |
|
Content |
100 |
200 |
1000 |
100 |
50 |
100 |
50 |
Mechanical properties
|
Diameter(mm) |
Φ3.18-63.5 |
|
Ultimate Tensile Strength (MPa) |
172 |
|
Yield strength (MPa) |
103 |
|
Elongation(%, 1-in gage length) |
25 |
Testing and Quality Control of Tantalum Sputtering Target Disc

FAQ for Tantalum Sputtering Target Disc
Are you a factory or manufacturer?
A: Yes, we are a factory, but we generally use our trading company to handle the business abroad. It will be more convenient to receive the remittance and arrange the shipment.
What is the delivery method?
A: Generally, we send cargo by UPS, DHL, or FedEx. Also, we can send by sea to a seaport or by air to the closest airport.
Why is your product so cost-effective?
A: We cut out the middlemen in the end-to-end manufacturing process, and we obtain raw material directly from its source.
Do you do spot quality inspection or full inspection?
A: 100% full inspection for sure. All unqualified products are discarded.
How do you ensure your lead time?
A: From material preparation to machining and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.
What is the MOQ of Tantalum Sputtering Target Disc?
A: Depends on quantity, generally, no MOQ limit.
How to pay for it?
A: A bank transfer (T/T) will be acceptable.
What is the delivery time?
A: around 7-20 days, which depends on the quantity and production.
What kind of package is it?
A: Generally, we use a carton case or a plywood case with protective material inside to ensure the safety of cargo.
What is the lead time?
A: From the order placed to cargo receiving will take around 10-25 days.

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