Products Description
Ion implantation is a kind of material surface modification high technology which has been flourishing and widely used internationally in the past three decades, realizing the optimization of surface properties of materials or can obtain some new excellent properties. Due to the unique and outstanding characteristics of this high technology, it is a very important technology in modern integrated circuit manufacturing. It uses ion implantation machine to realize the doping of semiconductor and change the conductivity and transistor structure of semiconductor.
The processing process of high-precision tungsten devices for semiconductor ion implantation is tungsten powder → pressing → sintering → rolling → heat treatment of finished products → wire cutting → machining.
Features And Application
Features:
High-Temperature Resistance: Tungsten and molybdenum have extremely high melting points-3410°C for tungsten and 2620°C for molybdenum-enabling them to withstand the high-temperature environments generated during ion implantation.
Corrosion Resistance: During ion implantation, equipment is exposed to corrosive gases. The corrosion-resistant properties of tungsten and molybdenum ensure stability under such harsh conditions.
High Strength: Even at elevated temperatures, tungsten and molybdenum maintain high mechanical strength, preventing damage under strong electromagnetic fields and high mechanical stress.
High Thermal Conductivity: Their excellent thermal conductivity facilitates rapid heat dissipation, ensuring stable equipment operation.
Precision Machining: These components often require high-precision machining to guarantee accurate ion beam focusing on wafers.
Long Service Life: Thanks to their excellent features, these parts have an extended lifespan, reducing replacement frequency.
Applications:
Semiconductor Manufacturing: In semiconductor production, ion implantation is a critical process for doping and modifying semiconductor materials. Tungsten and molybdenum components play a vital role in ion implantation equipment, such as shielding and support elements in ion source systems.
High-Energy Physics Research: In high-energy physics experiments, ion implantation equipment is used to generate high-energy ion beams. Tungsten and molybdenum components can withstand the impact of these high-energy beams.
Microelectronic Device Fabrication: In the production of microelectronic devices, ion implantation enables precise control over material electrical properties. The high precision and stability of tungsten and molybdenum components are essential for ensuring device performance.
Main implantation parts Type
Chambers (graphite, tungsten, molybdenum and alloys)
Filaments (tungsten and tungsten alloys)
Blades (graphite, tungsten, molybdenum and alloys)
Brackets (tungsten, molybdenum and alloys)
Cathodes (tungsten, molybdenum and alloys)
Spare parts (graphite, tungsten, molybdenum and alloys, ceramics, steel)
FAQ
Are you a factory or manufacturer?
A: Yes, we are a factory but generally, we use our trading company to handle the business abroad. It will be convenient to receive the remittance and arrange the shipment.
What is the delivery method?
A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to seaport or by air to the closest airport.
Why is your product so cost-effective?
A: We cut out the middlemen in the end-to-end manufacturing process. Rather than obtaining semi-finished goods from other suppliers, we obtain our raw material of APT powder directly from its source.
Do you do spot quality inspection or full inspection?
A: 100% full inspection. Inspectors will check the finished product individually, to ensure they adhere to all parameters. All unqualified products are discarded.
How do you ensure your lead time?
A: We have an efficient Order Management System, from material preparation to machining, and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.
What is the MOQ of Custom Machined Tungsten Molybdenum Implantation Parts?
A: Depends on quantity, generally, no MOQ limit.
How to pay for it?
A: A bank transfer (T/T) will be acceptable.
What is the delivery time?
A: around 7-20 days which depends on the quantity and production.
What is kind of the package?
A: Generally, we use a carton case or plywood case with protective material inside to ensure the save of cargo
What is the lead time?
A: from order placed to cargo receiving will take around 10-25 days.
Can these parts be customized for specific equipment?
Yes, we provide precision CNC machining, EDM (electrical discharge machining), and grinding services to meet exact specifications for ion beam shaping, shielding, and structural components.
How does surface finish affect performance?
A smooth, high-quality surface finish:
Reduces particle contamination in vacuum environments
Improves ion beam accuracy
Extends component lifespan by minimizing wear
What tolerances can be achieved in machining?
Depending on the design, we can achieve tolerances as tight as ±0.005mm (±5 microns) for critical dimensions.
Are these parts suitable for ultra-high vacuum (UHV) environments?
Yes, tungsten and molybdenum are ideal for UHV applications because they:
Have low outgassing rates
Resist degassing under high temperatures
Maintain integrity in vacuum conditions
How do you ensure quality and durability?
Material purity checks (99.95%+ for critical applications)
Precision metrology verification (CMM, optical measurement)
Performance testing under simulated operating conditions
What coatings or treatments are available?
Optional enhancements include:
Polishing & mirror finishes for reduced contamination
Anti-sputtering coatings to prolong service life
High-temperature oxidation-resistant treatments
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