Products Description
Ion implantation is a very important technology in modern integrated circuit manufacturing, which uses an ion implantation machine to achieve semiconductor doping. It uses tungsten wire as the cathode to emit electrons to bombard gas molecules containing specific impurity elements, producing ionized specific impurity atoms that are accelerated by an electrostatic field and hit the surface of a silicon single crystal wafer, and then implanted into the semiconductor to change the conductivity characteristics and ultimately form a transistor structure.
Due to the stable high-temperature chemical properties, small thermal deformation, and long service life of tungsten molybdenum materials, the ion source components and consumables of ion implantation machines in the semiconductor industry are mostly made of tungsten and molybdenum materials. These devices include shielding tubes for emitting electron cathodes, emission panels, central fixing rods, and wire plates in the arc chamber. We collectively refer to them as tungsten parts for ion implantation and molybdenum parts for ion implantation.
features
High-Temperature Resistance: Molybdenum has a high melting point, so it can withstand extreme heat up to 1400°C during ion implantation.
Corrosion Resistance: The equipment is exposed to corrosive gases, but molybdenum resists corrosion well, keeping it stable in harsh chemical environments.
High Thermal Conductivity: Molybdenum conducts heat efficiently, helping to dissipate heat quickly and ensuring stable operation at high temperatures.
High Purity: High-purity molybdenum reduces impurity contamination, improving the accuracy and quality of ion implantation.
Precision Machining: These parts often require high-precision machining to ensure the ion beam is accurately focused and transmitted.

applications
Semiconductor Manufacturing: Mo ion implantation spare parts are widely used in semiconductor manufacturing, especially in ion implantation for logic chips, memory chips, and power devices. For example, when making transistors, ion implantation helps form the source and drain regions.
Improved Equipment Performance: These parts enhance ion implanter performance by enabling higher beam current, more precise dose control, and better uniformity.
Lower Maintenance Costs: Thanks to their high durability and long lifespan, they reduce maintenance needs and downtime, saving costs.

Specification
|
Model Number |
Mo Ion implantation spare parts |
|
Shape |
Customized |
|
Material |
Molybdenum,Tungsten |
|
Chemical Composition |
W,Mo |
|
Product name |
Mo Ion implantation spare parts |
|
Material |
tungsten/tungsten alloy |
|
Purity |
99.95% Min |
|
Shape |
made to drawings |
|
Application |
ion implantation |
|
Density |
10.2g/cm3,19.2g/cm3 |
|
Surface |
polished |
|
Certificate |
ISO 9001 and ISO14001 |
|
Other name |
molybdenum part |
FAQ
Are you a factory or manufacturer?
A: Yes, we are a factory but we generally use our trading company to handle the business abroad. It will be more convenient to receive the remittance and arrange the shipment.
What is the delivery method?
A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to seaport or by air to the closest airport.
Why is your product so cost-effective?
A: We cut out the middlemen in the end-to-end manufacturing process and we obtain raw material directly from its source.
Do you do spot quality inspection or full inspection?
A: 100% full inspection for sure. All unqualified products are discarded.
How do you ensure your lead time?
A: From material preparation to machining and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.
What is the MOQ of Mo Ion Implantation Spare Parts ?
A: Depends on quantity, generally, no MOQ limit.
How to pay for it?
A: A bank transfer (T/T) will be acceptable.
What is the delivery time?
A: around 7-20 days which depends on the quantity and production.
What is kind of the package?
A: Generally, we use a carton case or plywood case with protective material inside to ensure the save of cargo
What is the lead time?
A: from order placed to cargo receiving will take around 10-25 days.
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