Products Description
Molybdenum semiconductor ion implant parts are essential parts of the semiconductor processes. They are also important in the ion implantation process. Specifically, ion implantation is a methodology that employs energetic ions to modify the physical and chemical attributes of various materials, particularly when producing intricate electronic parts with precise defined operational traits.
Molybdenum components play a important role in ion implantation. These components are usually utilized in the most critical areas of ion implanters like, chambers, filaments, blades, brackets, cathodes, etc.
Features and Core Advantages
| Feature | Value in Semiconductor Industry |
| High Melting Point (2623°C) | Tolerates high-temperature processes in semiconductor manufacturing (such as CVD, annealing). |
| Low Coefficient of Thermal Expansion | Matches with silicon wafers (Si), reducing wafer warping due to thermal stress. |
| Excellent Thermal Conductivity (138 W/m·K) | Rapid heat dissipation, enhances the reliability of high-power devices (such as GaN/SiC). |
| High Purity (≥99.95%) | Avoids metal contamination (Na/K/U/Th <1ppb), complies with SEMI F47 standards. |
| Good Mechanical Strength | Supports wafer handling systems, better resistance to deformation than graphite. |
Applications of Molybdenum ion implantation parts
Front-End
Ion implanter: Molybdenum collimator, beam stop.
Diffusion/LPCVD equipment: Heater, heat shield.
Lithography machine: EUV mirror substrate (low thermal deformation).
Back-End
Power module: Molybdenum copper (MoCu) heat dissipation substrate (CTE matching Si chip).
Lead frame: high current carrying capacity, replacing traditional copper alloy.
Specification of molybdenum ion implantation.
|
Grade |
Mo,TZM |
|
Technique |
Hot Rolling,Forging,Flattening,Annealing,Machining |
|
Melting Point |
2610℃ |
|
Purity |
Mo≥99.95% |
|
Size / Shape |
Customized |
|
Density |
10.2g/cm3 |
|
Surface |
Polishing, Anodizing, Zinc plating,Chemical Cleaning,Powder coating, etc. |
|
Standard |
ASTM B777,DIN,GB |
FAQ for molybdenum ion Iimplant parts
1. Why do semiconductor ion implanters need tungsten and molybdenum materials?
✅ High melting point: Tungsten (W, 3422°C) and molybdenum (Mo, 2623°C) can withstand the high temperature environment of ion implantation and avoid thermal deformation.
✅ Low sputtering rate: Reduce target material loss and extend component life.
✅ Chemical stability: Resistant to plasma corrosion, suitable for highly reactive gases (such as BF₃, PH₃).
✅ Mechanical strength: Support the impact of high-energy ion beams and reduce wear.
2. Which parts of ion implanters utilize tungsten/molybdenum?
| Part | Material | Function |
| Ion Source Electrode | Tungsten/Molybdenum | Emits ions; must withstand high temperatures and sputtering |
| Beam Collimator | Tungsten | Focuses ion beams to reduce scattering |
| Implantation Target | Molybdenum | Supports the wafer and resists thermal deformation |
| Plasma Chamber Wall | Tungsten | Corrosion resistance to extend the life of the chamber |
3. Performance Comparison of Tungsten and Molybdenum in Ion Implanters
| Characteristics | Tungsten (W) | Molybdenum (Mo) |
| Melting Point | 3422°C | 2623°C |
| Thermal Conductivity | Higher | Moderate |
| Cost | Higher | Lower |
| Machinability | More Difficult (due to high hardness) | Easier |
| Suitable Applications | Extremely high-energy implantation | Conventional implantation |
4. What are the manufacturing processes for tungsten and molybdenum parts?
Powder metallurgy: high-temperature sintering (>2000°C) to make high-density parts.
Machining: CNC precision turning/milling (tungsten is brittle and requires special tools).
5. What is the MOQ of molybdenum ion implantation parts.
A: Depends on quantity, generally, no MOQ limit.
6. How to pay for it?
A: A bank transfer (T/T) will be acceptable.
7. What is the delivery time?
A: around 7-20 days which depends on the quantity and production.
8. What is the package?
A: carton case or plywood case.
9. What is the lead time?
A: from order placed to cargo receiving will take around 10-25 days.
10. What is the delivery method?
A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to seaport or by air to the closest airport.
Hot Tags: molybdenum ion implant parts, China molybdenum ion implant parts suppliers, factory, Molybdenum Round Bar, Pure Molybdenum
