Tungsten Ion Injector Parts
Tungsten Ion Injector Parts

Tungsten Ion Injector Parts

Tungsten ion-implanted parts are mainly used in the semiconductor industry for ion implantation, helping to produce high-performance chips. Besides, they are also used in high-temperature parts in aerospace, precision instruments in medical devices, key components in electronics, and high-temperature furnaces in the energy sector. Thanks to their excellent performance, they ensure stable operation and improve product quality.
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Description of Tungsten Ion Injector Parts

 

Tungsten Ion injector parts are made of pure tugnstenwhich has high melting point, Ion implantation is a very important technology in modern integrated circuit manufacturing, which uses an ion implantation machine to achieve doping of semiconductors, i.e., using a tungsten wire as a cathode to emit electrons to bombard gas molecules containing specific impurity elements, resulting in ionized specific impurity atoms accelerated by an electrostatic field and hitting the surface of a silicon single crystal wafer and hitting the inside of the semiconductor, changing the conductive properties and eventually forming a transistor structure.

 

Ion implantation is an important process that is widely used in semiconductor device fabrication, metal finishing, and materials science research. The components of ion implantation are often made of TZM, molybdenum, and tungsten because these materials can perform well in harsh environments.

 

Manufacturing process and precision machining of tungsten ion injector parts


Forming technology
Powder metallurgy (PM):

Tungsten powder (3-5μm) isostatic pressing (200MPa) → sintering (2200℃/H₂), density>95% theoretical value.

Additive manufacturing (AM):

Laser powder bed fusion (LPBF) forms complex cooling channels, but subsequent hot isostatic pressing (HIP) is required to eliminate pores.

Precision machining challenges
Micro-hole machining:

Ion implanter nozzles (aperture 0.1-0.5mm) require electrospark machining (EDM), and the surface roughness Ra is less than 0.8μm.

Welding process:

Electron beam welding (vacuum environment) avoids oxidation, and the weld strength reaches 90% of the parent material (ASTM E8 test).

 

Features of Tungsten Ion Injector Parts

 

High Purity: Tungsten ion-implanted parts typically have a purity of over 99.95%. This helps prevent contamination of products and wafers during ion implantation.

High Density & Hardness: Tungsten has a density of 19.1 g/cc, along with high hardness and low ductility. This ensures stability in high-temperature and high-energy environments.

Excellent High-Temperature Performance: Tungsten has an extremely high melting point (3420°C), along with good thermal conductivity and low thermal expansion. This makes it perform well in extreme heat.

Corrosion Resistance: Tungsten resists fluoride ions well, reducing chemical erosion and contamination risks.

Fine Grain Structure: The manufacturing process creates a fine grain structure, resulting in a smooth surface and improved mechanical properties.

 

product-768-708

 

Applications of Tungsten Ion Injector Parts

 

Semiconductor Manufacturing: Tungsten ion-implanted parts are widely used in semiconductor production, especially in ion implantation for making semiconductor devices.

Aerospace: Thanks to tungsten's high melting point and strength, these parts are also used in key aerospace components like nozzles, engine parts, and high-temperature sensors.

Medical Devices: Tungsten's biocompatibility and antibacterial properties make it suitable for medical tools, such as surgical instruments and implants.

Electronics Industry: Due to its good electrical conductivity and heat resistance, tungsten is used in electronics, including connectors, electrical contacts, and electrodes.

Energy Sector: In the nuclear and oil & gas industries, tungsten is used in high-temperature furnaces and reactor components.

 

product-864-660

 

Specifications of Tungsten Ion Injector Parts

 

Model Number

Tungsten Ion injector parts

Shape

Customized

Material

Molybdenum, Tungsten

Chemical Composition

W, Mo

Product name

Tungsten ion implantation spare parts

Material

tungsten/tungsten alloy

Purity

99.95% Min

Shape

made to drawings

Application

ion implantation

Density

10.2g/cm3,19.2g/cm3

Surface

polished

Certificate

ISO 9001 and ISO 14001

Other name

molybdenum part

 

Failure Mechanism of Tungsten Ion Injector Parts


Common failure modes
Thermal fatigue cracks:

Cause: Frequent thermal cycles (room temperature → 800°C) lead to grain boundary stress concentration.

Solution: Gradient material design (surface W-Cu, core pure tungsten).

Plasma erosion:

Data: In D⁺ plasma (1×10²² ions/m²s), the erosion rate is 0.1nm/h (compared to graphite 1nm/h).

 

Quality Control Testing Of The Material

 

product-760-700

 

FAQ for Tungsten Ion Injector Parts

 

Are you a factory or a manufacturer?

A: Yes, we are a factory but we generally use our trading company to handle the business abroad. It will be more convenient to receive the remittance and arrange the shipment.

What is the delivery method?

A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to a seaport or by air to the closest airport.

Why is your product so cost-effective?

A: We cut out the middlemen in the end-to-end manufacturing process, and we obtain raw material directly from its source.

Do you do spot quality inspection or full inspection?

A: 100% full inspection for sure. All unqualified products are discarded.

How do you ensure your lead time?

A: From material preparation to machining and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.

What is the MOQ of Tungsten Ion Injector Parts?

A: Depends on quantity; generally, no MOQ limit.

How to pay for it?

A: A bank transfer (T/T) will be acceptable.

What is the delivery time?

A: around 7-20 days, which depends on the quantity and production.

What kind of package is it?

A: Generally, we use a carton case or a plywood case with protective material inside to ensure the safety of the cargo

What is the lead time?

A: From the order placed to cargo receiving will take around 10-25 days.

 

product-700-700

product-700-700

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