Tungsten Ion Implantation Spare Parts

We provides high quality, precision machined molybdenum and tungsten components for processing equipment used in the manufacture of semiconductors, including Ion Implantation, MOCVD, CVD, PVD.

Our main products including cathode, arc chamber, repeller, side/end plate and fastener in ion source of axcelis and varian implanter worked in production processing of 12" and 16" wafer.

Tungsten material for ion implanter is mainly used to prepare parts of ion source of ion implanter. It is a tungsten material made of high-purity tungsten metal powder as raw material, which is made by powder metallurgy and then rolled or forged. It has the advantages of high density, high hardness, extremely low vapor pressure, and excellent high temperature strength.

High-temperature resistance: It can work at temperatures up to 1400°C, so tungsten ion-implanted parts can withstand the high heat during ion implantation.

Corrosion resistance: It has excellent corrosion resistance. Even when exposed to strong electromagnetic fields and corrosive process gases, it remains stable.

High thermal conductivity: Its good thermal conductivity helps spread heat quickly, preventing damage from local overheating.

High purity: It has strict limits on impurities. For example, sodium (Na) must not exceed 0.0025%, chromium (Cr) 0.0015%, and iron (Fe) 0.0015%. High-purity tungsten avoids interference from impurities during ion implantation.

Good mechanical properties: It has high strength and strong mechanical performance, allowing it to handle the stress during ion implantation.

Semiconductor Manufacturing: It is a key part of semiconductor production. It is used in critical components like ion sources, accelerators, and target chambers of ion implantation equipment. Ion implantation modifies the electrical properties of silicon wafers.

Solar Industry: It is used to produce rotating sputtering targets.

X-ray and Electron Tubes: It is used in the manufacturing of X-ray tubes and electron tubes.

Other Applications: It is also used in doping, silicon-on-insulator (SOI) technology, surface treatment, tool steel strengthening, and ion beam mixing.

FAQ

Are you a factory or manufacturer?

A: Yes, we are a factory but we generally use our trading company to handle the business abroad. It will be more convenient to receive the remittance and arrange the shipment.

What is the delivery method?

A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to seaport or by air to the closest airport.

Why is your product so cost-effective?

A: We cut out the middlemen in the end-to-end manufacturing process and we obtain raw material directly from its source.

Do you do spot quality inspection or full inspection?

A: 100% full inspection for sure. All unqualified products are discarded.

How do you ensure your lead time?

A: From material preparation to machining and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.

What is the MOQ of Tungsten Ion Implantation Spare Parts?

A: Depends on quantity, generally, no MOQ limit.

How to pay for it?

A: A bank transfer (T/T) will be acceptable.

What is the delivery time?

A: around 7-20 days which depends on the quantity and production.

What is kind of the package?

A: Generally, we use a carton case or plywood case with protective material inside to ensure the save of cargo

What is the lead time?

A: from order placed to cargo receiving will take around 10-25 days.

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