Basic characteristics of aluminum-titanium targets
Shape of aluminum-titanium targets: flat targets, special-shaped targets
Purity of aluminum-titanium targets: 2N5, 3N
Size of aluminum-titanium targets: processed according to drawings or customized by others
We can also provide aluminum-titanium alloy sheets, plates, and rods.
Aluminum-titanium alloy target manufacturing process
Mix aluminum powder and titanium powder in a specific proportion (with an atomic ratio of 50-70:30-50). The mixing method is mechanical mixing, vacuum mixing, or inert protective gas mixing, and the mixing time is more than 30 minutes to obtain an aluminum-titanium powder mixture.
Put the aluminum-titanium mixed powder into the metal sleeve, and make the powder filling dense by vibrating and hammering the outer periphery of the sleeve. After welding the end cap and exhaust pipe of the metal sheath, put the metal sheath into the heating furnace, connect the exhaust pipe to the vacuum unit, and heat the exhaust. The exhaust temperature is 350-600℃. After the temperature is maintained until the vacuum degree reaches 1.5×10-3pa, the exhaust pipe is flattened and sealed;
The exhausted metal sheath is placed in the hot isostatic pressing equipment for hot isostatic pressing sintering. The hot isostatic pressing temperature is 600-880℃ and the pressure is 150MPa. The heat preservation and pressure maintenance are 5h to obtain the aluminum-titanium target sheath;
After hot isostatic pressing, the aluminum-titanium target material can be processed into the desired shape after turning to remove the outer sheath.
The aluminum-titanium target material made by this process has a good sputtering coating effect, the film layer is not easy to crack and fall off, and the film-base bonding is strong, which meets the actual needs of tool or decorative plating manufacturers.
Application of aluminum-titanium alloy target
Decorative coating: mainly used for surface coating of mobile phones, watches, glasses, sanitary ware, hardware parts, and other products, which not only beautifies the color, but also has the functions of wear resistance and corrosion resistance.
Low-radiation coated glass: using the principle of magnetron sputtering to sputter multiple layers of thin film on the glass to achieve energy saving, light control, and decoration.
Tool and mold coating: used for surface strengthening of tools and molds, which can significantly improve the service life of tools and molds and the quality of processed parts.
Solar cell coating: The sputtering coating process is the preferred preparation method for manufacturing solar cells.
