Products Description
Zinc oxide/aluminum oxide (AZO-ZnO/Al2O3) sputtering targets are ideal materials for making transparent conductive (TCO) coatings. Our targets have excellent optical and electrical properties, and are suitable for building energy-saving glass, automotive glass and various solar photovoltaic panels, and are highly recognized by customers.
The standard composition of AZO targets is ZnO/Al2O3-98:2.0wt%, and its composition can be customized according to requirements. There are many methods for preparing AZO thin films, mainly magnetron sputtering, metal organic chemical vapor deposition, pulsed laser deposition, spray thermal decomposition, molecular beam epitaxy and sol-gel method. Among them, magnetron sputtering AZO thin films have the advantages of high deposition rate, low substrate temperature and good substrate adhesion and are widely used.
Our company supply high purity AZO sputtering targets with high density and small average grain size for semiconductor, CVD and PVD display and optical applications.
Generally, we can produce AZO sputtering targets in different shapes such as disc, rectangle, column, step and custom shapes. Regular sizes of round targets include 1", 2", 3", 4", or 50mm, 60mm, 80mm, 100mm, etc. Regular thicknesses include 0.125" and 0.25", or 3mm, 4mm, 5mm, 6mm, etc.
Our sputtering targets can be bonded to copper backing plates upon request. We can also customize AZO sputtering targets of different purity, shapes and sizes.
From the selection of raw materials to the control of temperature, pressure and time of hot pressing sintering, we strictly follow the scientific production process, so that the ceramic sputtering targets we manufacture have the characteristics of high purity, high density, uniform surface color, no spots and cracks, etc., which ultimately enables users to obtain a constant erosion rate and high-purity, homogeneous films during the PVD process.
Features of Zinc Oxide/Aluminum Oxide (AZO) Sputtering Target
Material System Characteristics AZO-ZnO/Al₂O₃ Composite Structure Advantages:
Synergy Enhancement Effect: ZnO provides optoelectronic properties, Al₂O₃ enhances mechanical stability
Performance Balance:
Resistivity: 10⁻³~10⁻⁴ Ω·cm (dominated by AZO phase)
Hardness: 12-18 GPa (contributed by Al₂O₃ phase)
Special Functions:
UV blocking characteristics (300-400nm)
Visible light transmittance >85%
Typical Composition Design:
| Material Type | ZnO Content | Al₂O₃ Content | Doping Concentration (Al) |
| Standard AZO | 97-99% | 0% | 1-3 at.% |
| Composite Target A | 70-80% | 20-30% | 2 at.% |
Specification of Zinc Oxide/Aluminum Oxide (AZO) Sputtering Target
Regular Composition: ZnO/Al2O3=98/2wt%, 99/1wt%, etc
Purity: 99.99%;
Production Method: hot press sintering
Available dimensions:
Circular: Diameter = 1", 2", 3" and 4", other size can be customized
Rectangular: Length = 3mm and 6mm
|
Material Type |
Alumina doped Zinc Oxide |
|
Symbol |
Al2O3/ZnO 2/98 wt% |
|
Color/Appearance |
Solid in various forms |
|
Melting Point (°C) |
N/A |
Core application of Zinc Oxide/Aluminum Oxide (AZO) Sputtering Target
- Next-generation display technology
Flexible OLED transparent electrode (replacing ITO)
Resistance change rate <5% when bending radius <2mm
Haze <1.5%
Micro LED array interconnection
- Photovoltaic field
Perovskite solar cell window layer
Carrier mobility >25 cm²/V·s
Adjustable work function (4.3-5.1eV)
- Smart surface
Electrochromic device conductive layer
Self-cleaning antibacterial coating (UV activated)
FAQ
Are you a factory or manufacturer?
A: Yes, we are a factory but we generally use our trading company to handle the business abroad. It will be more convenient to receive the remittance and arrange the shipment.
What is the delivery method?
A: Generally, we send cargo by UPS, DHL or FedEx. Also, we can send by sea to seaport or by air to the closest airport.
Why is your product so cost-effective?
A: We cut out the middlemen in the end-to-end manufacturing process and we obtain raw material directly from its source.
Do you do spot quality inspection or full inspection?
A: 100% full inspection for sure. All unqualified products are discarded.
How do you ensure your lead time?
A: From material preparation to machining and finally to a full inspection. Every stage of production is strictly monitored and controlled to give you an accurate delivery time.
What is the MOQ of Zinc Oxide/Aluminum Oxide (AZO-ZnO/Al2O3) Sputtering Target?
A: Depends on quantity, generally, no MOQ limit.
How to pay for it?
A: A bank transfer (T/T) will be acceptable.
What is the delivery time?
A: around 7-20 days which depends on the quantity and production.
What is kind of the package?
A: Generally, we use a carton case or plywood case with protective material inside to ensure the save of cargo
What is the lead time?
A: from order placed to cargo receiving will take around 10-25 days.
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